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Tilt Beam Sensor

Vigor Technology MEMS Inclinometer / Tilt Beam Sensor


  • High resolution, accuracy & stability 
  • High safety remote signal transmission distance>500m 
  • U-Shaped openings in both ending, easy to connect sensors 
  • IP65protection 
  • Alloyed & anodized aluminum housing, corrosion-resistant,wear-resistant, artistic 


Buildings and structures adjacent to deep excavation and series walls. 
Buildings and structures impacted by tunneling and mining. 
Subgrade treating, grouting & supporting structure. 
Oil tank 
Retaining wall 
Subside and collapse

Tilt Beam Sensor
Measurement range ±5° ±10° ±15°
Combined absolute
accuracy ①(@25 ℃ )
±0.01°(0.17mm/m) ±0.015°(0.26mm/m) ±0.02°(0.35mm/m)
Absolute linearity
±0.06%FS ±0.03%FS ±0.03%FS
Cross-axis sensitivity② ±0.1%FS
Offset ③ ±0.005°(0.1mm/m)
Repeatability ±0.0025°(0.05mm/m)
Hysteresis ±0.0025°(0.05mm/m)
Input axis misalignment ④ ±4.0° ±3.0° ±2.5°
Sensitivity temp. drift coefficient ≤100ppm/ ℃
Offset temperature drift coefficient ≤0.003° (0.06mm/m)/ ℃
Offset turn on repeatability⑤ ±0.008°(0.15mm/m)
Resolution 0.0025°(0.05mm/m)
Long-term stability @ 1year ⑥ ≤0.02°(0.4mm/m)
Measurement axis 1 axis
Temperature sensor Range:-50~125℃ , Accuracy:±1℃
Output RS232(standard),Optional 5 types, please refer to accessories table3.1
RS232 data format 115200 baud, 8 data bits, 1 start bit, 1 stop bit, none parity,ASCII
Cold start warming time 60s
Response time ⑦ 0.3s @t90
Refresh rate(digital output) 5Hz (Standard), optional 10Hz, 20Hz
Response frequency ⑧ 3Hz @-3dB
Power supply 9 ~ 36VDC
Power consumption Average working current≤50mA; average power≤1.5W (25℃&24VDC)
Operation temperature range -40 ~ 85℃
Storage temperature range -60~100℃
EMC According to EN 61000
Insulation resistance 100MΩ
MTBF ≥25000 hours
Shock survival 100g@11ms, three-axis, half sine
Anti-vibration 8grms, 20 ~ 2000Hz
Protection IP67
Connector Metal pigtails
Cable 7-wire shielded cable with tensile reinforcement, heavy duty up to 30Kg
Weight 1.3Kg(with connector and cable,1M length of housing)

① Combined absolute accuracy means the compositive value of sensor's absolute linearity, repeatability, hysteresis, offset and cross-axis sensitivity error.(in room temperature condition) as
② The cross-axis sensitivity error means the angle that the tilt sensor may be banked to the normal tilt direction of sensor. The cross-axis sensitivity (±0.1%FS) shows how much perpendicular acceleration or inclination is coupled to the inclinometer output signal. For example, for the single-axis inclinometer with range ±30° (assuming the X-axis as measured tilt direction), when there is a 10° tilt angle perpendicular to the X-axis direction(the actual measuring angle is no change, example as +8.505° ), the output signal will generate additional error for this 10° tilt angle, this error is called as cross-axis sensitivity error. SST300`s cross-axis sensitivity is 0.1%FS, the extra error is 0.1%×30° =0.03°(max), then real output angle should be +(8.505° ±0.03° ). In SST300 series, this error has been combined into the absolute accuracy
③ Offset means that when no angle input (such as the inclinometer is placed on an absolute level platform), output of sensor is not equal to zero,the actual output value is zero offset value.
④ Input axis misalignment means during the installation, the allowable installation angle deviation between actual tilt direction and sensor’s nature measurement direction. In general, when installed,SST300 sensor is required that the measured tilt direction keep parallel or coincident with sensor designated edge, this parameter can be allowed a certain deviation when sensor is installed and does not affect the measurement accuracy.
⑤ Offset turn on repeatability means the repeatability of the sensor in repeated by supply power on-off-on many times.
⑥ Long-term stability means the deviation between the statistics of the maximum and the minimum output value after a year of continuous power supply when the sensor is at 20℃ .
⑦ The response time refers to the angle sensor in a step change (such as the angle changes from -10 ° to +10 ° within 5ms), the time required that output of the sensor achieved to the standard value of 90%. The index is different from the sensor set-up time
⑧ Response frequency is for the limitation of the dynamic measurement range, when the dynamic measurement exceeds 3 Hz, because of centripetal force, the output occupied additional random error, this error is difficult to define.